Microtechnology/Microelectromechanical Systems (MEMS)
Applications
[edit | edit source]Resonators
[edit | edit source]Strain Gauges
[edit | edit source]Pressure Sensors
[edit | edit source]AFM cantilevers
[edit | edit source]Acceleration Detectors
[edit | edit source]Optical Beam Control
[edit | edit source]RF MEMS
[edit | edit source]Reliability design rules
[edit | edit source]Sandia has published a set of "reliability design rules" for MEMS devices intended to avoid failure modes experienced in early MEMS device tests. The most common failure mechanism was wear of the rubbing surfaces. [1]
References
[edit | edit source]See also notes on editing this book about how to add references Microtechnology/About#How to Contribute.
- ↑ Danelle M. Tanner et. al. "MEMS Reliability: Infrastructure, Test Structures, Experiments, and Failure Modes". Sandia. 2000.