Microtechnology/Overviews
Overviews
[edit | edit source]Internet Resources
[edit | edit source]- This wikibook links extensively to wikipedia, but also to many valuable external resources.
See also
Books
[edit | edit source]Books about microfabrication
- "Fundamentals of Microfabrication" (2nd ed, 2002) by M. Madou - highly recommended!
- "Introduction to Microfabrication" (2004) by S. Franssila
Journals
[edit | edit source]Overview of the microtechnology related journals and their impact factors (Aug. 2006 values)
| Journal | link | Impact Factor | Comments |
|---|---|---|---|
| American Journal of Physics (AJP) | [1] | 0.82 | ? |
| IEEE Transactions of Electron Devices | [2] | ? | IEEE |
| Electronics Letters | [3] | 1.0 | ? |
| Journal of Applied Physics | [4] | 2.5 | ? |
| Journal of Materials Processing Technology | [5] | 0.6 | ? |
| Journal of Microelectromechanical Systems (J.MEMS) | [6] | 3 | ? |
| Journal Of Microlithography Microfabrication And Microsystems | [7] | 1.4 | ? |
| Journal of Micromechanics and Microengineering | [8] | 2.5 | ? |
| Journal of Microsystem Technologies | [9] | 0.72 | microsystem technologies-micro-and nanosystems-information storage and processing systems |
| Journal of Solid-state electronics | [10] | 1.2 | ? |
| Journal of Vacuum Science and Technology A (JVSTA) | [11] | 1.4 | Vacuum, Surfaces, Films |
| Journal of Vacuum Science and Technology B (JVSTB) | [12] | 1.6 | Microelectronics and Nanometer Structures: Processing, Measurement, and Phenomena |
| Lab on a Chip | [13] | 5.3 | ? |
| Microelectronic Engineering | [14] | 1.4 | ? |
| Microelectronics Journal | [15] | 0.35 | ? |
| Sensor Letters | [16] | 1.1 | ? |
| Sensors and Actuators A: Physical | [17] | 1.4 | ? |
| Sensors and Actuators B: Chemical | [18] | 2.6 | ? |
| Surface and Coatings Technology | [19] | 1.6 | ? |
Software
[edit | edit source]Layout Editor
[edit | edit source]MEMS Simulation
[edit | edit source]Optical Simulations
[edit | edit source]Microfabrication Products & Companies
[edit | edit source]Where to buy raw materials, wafers etc, and where to get the fabrication done is you cannot readily access cleanroom facilities.
Foundry services
[edit | edit source]- Danchip- cleanroom access for both industry and universities
- Freescale
- Honeywell MEMS Foundry Services
- X-fab
- Micrel's Wafer Fab Division
- ISSYS
- Micralyne MEMS Foundry
Suppliers of materials for microfabrication
[edit | edit source]Wafers
[edit | edit source]Silicon on insulator (SOI) wafers
[edit | edit source]- Icemostech [20]; UK; [sales@Icemostech.com]; Device layer +/- 0.5 µm
- University wafers [21]; USA; Chris Baker [@universitywafer.com]; All kinds of wafers, possibility of small quantities
- Soitec [22]; France; Sabrina Grosdidier [sabrina.grosdidier@soitec.fr]; High quality SOI, device layer +/- 5 nm
- MEMC USA Marco Maffe [mmaffe@memc.it]; Device layer +/- 0.5 µm
- Ultrasil [23]; USA; Thomas J. Gentemann [ultrasiltg@aol.com]; Device layer +/- 0,5 µm, next day shipment of wafers from online inventory
- Okmetic Oyj [24]; Finland; Veli-Pekka Virtanen [veli-pekka.virtanen@okmetic.com]; Device layer +/- 0.5 µm
- IBIS [25]; USA; High quality SOI; Device layer +/- 5 nm
Microtechnology Products
[edit | edit source]A Microtechnology Timeline
[edit | edit source]- The first transistor
- The first microchip
- The first microprocessor
- 1965 Moores Law
- The roadmap
- The first PCR lab-on-a-chip system
- The first point-of-care lab on a chip system
References
[edit | edit source]See also notes on editing this book about how to add references Microtechnology/About#How to Contribute.